UV/ozone UVOCS Inc. – T10X10 model

The UV/ozone cleaning process provides a simple, inexpensive and fast method of achieving ultra-clean surfaces free of organic contaminants. This process is ideal when a thin film deposit with excellent surface adhesion is required. Ultra-clean surfaces can easily be obtained by UV/ozone treatment in one to several minutes after the surface has been cleaned by conventional techniques. The UV/ozone cleaner is not designed to remove gross contamination. Typical UV/ozone cleaning times are approximately 1 minute.