Spray Pyrolysis Pilot Unit (AA-CVD)
Spray pyrolysis is a thin-film deposition technique based on spraying a solution containing chemical precursors onto a heated substrate.
Unlike most academic or industrial spray pyrolysis systems, which operate in open air under a fume hood, our equipment operates within a closed chamber with a controlled atmosphere. This configuration enables precise management of precursor injection and reaction by-product evacuation, ensuring improved reproducibility, traceability, and safety compared with open systems.
The solution is atomized into fine droplets and transported to the substrate. Upon contact with the heated surface (typically between 400 and 800 °C), the compounds decompose and form a functional solid coating.
This approach, similar to CVD but using liquid precursors, is particularly well suited to the cost-effective manufacture of functional coatings.
The technology supports a wide range of precursors: metallic nitrates, metallic chlorides, alkoxides (such as Zr(OR)₄), and organometallic complexes.
This flexibility allows the deposition of numerous functional oxides (ZrO₂, TiO₂, etc.).
Key Features:
- Controlled-atmosphere chamber (currently operated in oxidative mode / air)
- Exhaust gas capture and treatment system
- Fully computer-controlled process
- Substrates up to A4 format (glass, quartz, silicon wafers, metals)
- Heated stage up to approximately 500 °C
This equipment enables operation under reproducible and safe conditions, making it well suited to industrial development projects.
Applications:
- Functional coatings (optical, barrier, catalytic)
- Functional glazing: low-emissivity coatings, transparent
